主催:フラウンホーファーENAS(エレクトロ・ナノシステム研究所)
協力:東北大学 マイクロシステム融合研究開発センター(μSIC)、フラウンホーファー日本代表部
日時:2023年11月21日(火)10時~19時
参加費:無料
| 10:00 – 10:10 am | Welcome and Opening Hideya Miki, Fraunhofer Japan and Prof. Aoki, Tohoku University |
| 10:10 – 11:50 am | Keynote Session |
| Transfer of R&D to the Industry – Test and Reliability Center Prof. Harald Kuhn, Fraunhofer ENAS |
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| Open Collaboration for R&D and Human Resource Development Prof. Kentaro Totsu, Tohoku University |
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| Flexible Optical Waveguides and Microoptics for Medical Implants in the Context of Optogenetics Prof. Ulrich T. Schwarz, Chemnitz University of Technology |
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| Nanoengineered Micro/Nanosystems Prof. Takahito Ono, Tohoku University |
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| 11:50 am – 1:00 pm | Lunch Break | Exhibition |
| 1:00 – 2:00 pm | Session "Fabrication" |
| Innovation of Microsystems based on Wafer Bonding Technology Prof. Shuji Tanaka, Tohoku University |
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| Smart Sensor Systems for High-Temperature Application by Integration with a SiC CMOS Technology Michael Jank, Fraunhofer IISB |
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| Innovations in Wafer Bonding for the Fabrication of Smart Systems Dr. Maik Wiemer, Fraunhofer ENAS |
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| 2:00 – 2:30 pm |
Break | Exhibition |
| 2:30 – 3:30 pm | Session "Integration" |
| Heterogeneous Integration Based on Room-Temperature Bonding for MEMS and Sensors Prof. Eiji Higurashi, Tohoku University |
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| Room Temperature Oxide-Free Direct Bonding for Next Level Heterogenous Integration Tobias Wernicke, EV Group |
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| Heterogeneous System Integration Approaches by a Silicon Foundry Stefan Ernst, X-FAB MEMS Foundry GmbH |
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| 3:30 – 4:00 pm | Break | Exhibition |
| 4:00 – 5:00 pm | Session "Test" |
| NanoTerasu; Next Generation SR Facility Building a New Range of Innovation Ecosystem Prof. Masaki Takata, Tohoku University |
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| Highly efficient automated tests on wafer level for MEMS and Photonics Dr. Alexander Weiß, Fraunhofer ENAS |
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| Photonic integrated circuits for testing Shunsuke Abe, Advantest Corporation |
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| 5:00 – 7:00 pm | Dinner Reception |
下のプログラムをダウンロードし、申込書にご記入の上、下記までお申し込みください。
メール: fraunhofer-symposium@enas.fraunhofer.de
Fax:+81 22 795 6259
無料
fraunhofer-symposium@enas.fraunhofer.de
Fax: +81 22 795 6259
東北大学 片平キャンパス さくらホール
アクセス:http://www.tohoku.ac.jp/japanese/profile/campus/01/katahira/areae.html
11 21, 2023
英語