フラウンホーファー日本代表部ISIM 2011 (First International Symposium on Integrated Microsystem)
日時：2011年2月10日 9:30-19:30
会場：つくば国際会議場エポカル（http://www.epochal.or.jp/access/index.html)
フラウンホーファーENAS（エレクトロ・ナノシステム研究所）所長、Prof. Gessnerが「Smart Systems Integration by using advanced MEMS technologies」を題に講演を行います。
＜プログラム＞
Project report (9:30-11:50)
09:30 Introduction of the “Integrated Microsystems” project
Prof. M. ESASHI (Tohoku Univ.)
09:50 Initial stage prototyping for the hetero integration
Prof. S. TANAKA (Tohoku Univ.)
10:10 Hands-on access to fabrication facility
Prof. K. TOTSU (Tohoku Univ.)
10:30 Massive parallel EB exposure systems
Prof. M. ESASHI (Tohoku Univ.)
10:50 Introduction of the “AIST Integrated Micro System Research Center”
Dr. R. MAEDA (AIST)
11:10 Production stage prototyping for the hetero integration
Dr. T. KOBAYASHI (AIST)
11:30 High efficiency production of integrated MEMS
Dr. H. TAKAGI (AIST)
11:50 Lunch and poster session
"International collaboration and MEMS foundry – from R&D prototyping to production –" (13:00-16:55)
13:00 SVTC (USA)
13:20 “Imec CMORE SiGe MEMS technology platform” (tentative)
Dr. Stephane DONNAY (IMEC - Belgium)
13:40 Dr. Laurent MALIER (LETI - France)
14:00 “Smart Systems Integration by using advanced MEMS technologies”
Prof. Thomas GESSNER (Fraunhofer Institute for Electronic Nano Systems ENAS - Germany)
14:20 “MEMS for biological applications and energy”
Prof. Candido Fabrizio PIRRI (Torino Institute of Technology - Italy)
14:40 “Wafer-Level Heterogeneous Integration Techniques for MEMS and IC”
Prof. Goran STEMME (Royal Institute of Technology KTH - Sweden)
15:00 Coffee break
15:15 “MEMS production strategy of devise company and Open innovation” tentative
Dr. Y. SEKIGUCHI (OMRON - Japan)
15:35 “New age of MEMS large wafer scale production” tentative
Dr. K. SUZUKI (Dainippon printing - Japan)
15:55 “MEMS process integration and volume production”
Dr. Jerwei HSIEH (APM - Taiwan)
16:15 Prof. Heng YANG (SIMIT - China)
16:35 “Asian collaboration on MEMS large scale production”
Dr. CHOI (RFID/USN Center - Korea)
16:55 Closing
17:30 -19:30 Poster session and discussion
＜お問い合わせ＞
東北大学 マイクロシステム融合研究開発センター 蛸島武尚様
Tel.022-795-6936, Fax 022-795-6935