The 23rd Micromachine/MEMS Exhibition

Date: July 11th - 13th, 2012 10:00 - 17:00
Venue: Tokyo Big Sight (East Hall)

The following Fraunhofer institutes will present their latest research topics:

Fraunhofer ENAS (Electronic Nano Systems): Booth D-19

  • Autonomous Sensor Network for Monitoring of Power Lines
  • Meta Materials for IR Optical Filter
  • Low-Temperature Wafer Bonding Processes for Smart Systems Integration
  • MEMS Technology for RF Components
  • In-vitro Diagnostic Platform - Micro Fluidic Cartridge for Point-of-Care Diagnostics

Fraunhofer IPMS (Photonic Microsystems): Booth D-20

  • Development / production of MEMS scanning mirrors, in particular linear Scanner ("LinScan") Press Release
  • Development / production of MEMS-mirror matrices (Spatial Light Modulator), in particular one-dimensional spatial light modulator ("Laser Direct Imaging ")
  • MEMS Foundry Services

MEMS Foundry Itzehoe GmbH (Spinoff from the Fraunhofer institute for Silicon Technology, ISIT): Booth D-21

  • Exhibit content TBA

Furthermore there will be several talks held by members of Fraunhofer:

11th July (Wed)
International Micromachine Nanotechnology Symposium MEMS Open Innovation

15:00 – 15:30    Foundry Model for Advanced MEMS Production and Technologies
                          Prof. Ralf Dudde, Fraunhofer ISIT
                          Dr. Peter Merz, CEO, MEMS Foundry Itzehoe GmbH, Germany

12th July (Thu)
Japanese-German Micro/Nano Business Forum

10:30 – 11:00    Smart Systems for a better life
                          Prof. Dr. Thomas Geßner, Fraunhofer ENAS
11:00 – 11:20    Advanced Integration and Packaging Technologies for Smart Systems
                          Prof. Dr. Klaus-Dieter Lang, Fraunhofer IZM
11:20 – 11:40    Smart Photonic Systems for healthy and secure living
                          Dr. Michael Scholles, Fraunhofer IPMS

For more information please refer to the official website: