WPI-AIMR and Fraunhofer ENAS Joint Workshop on Micro Integrated Devices
Date: February 22nd, 2013
Venue: Tohoku University, Aoba Memorial Hall 4F (Sendai)
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Researchers of Fraunhofer Institute will hold talks at WPI-AIMR and Fraunhofer ENAS Joint Workshop.
<Program>
10:00 - 10:10 Opening Remarks
Prof. Motoko Kotani, Director of WPI-AIMR
NEMS/MEMS and nanomaterial-enhanced passive components
(JST-DFG Cooperative Program)
10:10 - 10:30 Heterogeneous integration of MEMS and LSI using adhesive bonding
Prof. Masayoshi Esashi, WPI-AIMR
Prof. Shuji Tanaka, Graduate School of Engineering, Tohoku University
10:30 - 11:00 Smart Systems Integration by using Micro- and Nanotechnologies
Prof. Thomas Gessner, Fraunhofer ENAS
11:00 - 11:25 Nanomaterial integrated three dimensional inductors
Dr. Yu-Ching Lin, WPI-AIMR
11:25 - 11:50 Functional liquids within NEMS/MEMS fabrication
Felix Gabler, Fraunhofer ENAS
11:50 - 12:15 Wafer level bonding of heterogeneous substrates at low temperature
Jörg Frömel, Fraunhofer ENAS
Lunch break
Functional material integration
13:30 - 14:00 [Special Speech] Dealloyed nanoporous metals for device applications
Prof. Mingwei Chen, WPI-AIMR
14:00 - 14:30 [Guest Speech] Piezoelectric MEMS mirror with wide scan angle
actuated by Nb doped PZT film
Takayuki Naono, Fujifilm Corporation
14:30 - 14:50 MEMS switch using metallic glass thin film
Yu-Lang Chu, Fraunhofer ENAS, now GI3 Lab of WPI-AIMR
14:50 - 15:10 Integration and fabrication of magnetic metallic glass for MEMS
mirco-mirror system
Dr. Yao-Chuan Tsai, WPI-AIMR
15:10 - 15:30 Fabrication of L10FePt based patterned recording media
Dr. Neelam Kaushik, WPI-AIMR
Coffee break
Micro devices and fabrication
15:45 - 16:15 [Guest Speech] MEMS Technology challenges for RF-MEMS devices
Dr. Koichi Ikeda, Sony Corporation
16:15 - 16:35 Integrated Tactile Sensor Device
Dr. Masanori Muroyama, WPI-AIMR
16:35 - 16:55 Local redox cycling-based electrochemical chip device for
high-throughput cell analysis
Dr. Kosuke Ino, Graduate School of Environmental Studies,
Tohoku University
16:55 - 17:15 Microscale technologies to fabricate muscle tissues
Dr. Samad Ahadian, WPI-AIMR
17:15 Closing Address
Prof. Masayoshi Esashi
Closing
18:00 - 20:00 Reception
Admission: Free (Reception: 5,000 Yen)
Registration: February 8th 2013 (for Reception)
For registration and detailed program of Workshop, please refer to the PDF file below: