WPI-AIMR and Fraunhofer ENAS Joint Workshop on Micro Integrated Devices

Date: February 22nd, 2013
Venue: Tohoku University, Aoba Memorial Hall 4F (Sendai)

Researchers of Fraunhofer Institute will hold talks at WPI-AIMR and Fraunhofer ENAS Joint Workshop.


10:00 - 10:10 Opening Remarks
        Prof. Motoko Kotani, Director of WPI-AIMR

NEMS/MEMS and nanomaterial-enhanced passive components
(JST-DFG Cooperative Program)

10:10 - 10:30 Heterogeneous integration of MEMS and LSI using adhesive bonding
        Prof. Masayoshi Esashi, WPI-AIMR
        Prof. Shuji Tanaka, Graduate School of Engineering, Tohoku University

10:30 - 11:00 Smart Systems Integration by using Micro- and Nanotechnologies
        Prof. Thomas Gessner, Fraunhofer ENAS

11:00 - 11:25 Nanomaterial integrated three dimensional inductors
        Dr. Yu-Ching Lin, WPI-AIMR

11:25 - 11:50 Functional liquids within NEMS/MEMS fabrication
        Felix Gabler, Fraunhofer ENAS

11:50 - 12:15 Wafer level bonding of heterogeneous substrates at low temperature
        Jörg Frömel, Fraunhofer ENAS

Lunch break

Functional material integration

13:30 - 14:00 [Special Speech] Dealloyed nanoporous metals for device applications
        Prof. Mingwei Chen, WPI-AIMR

14:00 - 14:30 [Guest Speech] Piezoelectric MEMS mirror with wide scan angle
       actuated by Nb doped PZT film
        Takayuki Naono, Fujifilm Corporation

14:30 - 14:50 MEMS switch using metallic glass thin film
        Yu-Lang Chu, Fraunhofer ENAS, now GI3 Lab of WPI-AIMR

14:50 - 15:10 Integration and fabrication of magnetic metallic glass for MEMS
       mirco-mirror system
        Dr. Yao-Chuan Tsai, WPI-AIMR

15:10 - 15:30 Fabrication of L10FePt based patterned recording media
        Dr. Neelam Kaushik, WPI-AIMR

Coffee break

Micro devices and fabrication

15:45 - 16:15 [Guest Speech] MEMS Technology challenges for RF-MEMS devices
        Dr. Koichi Ikeda, Sony Corporation

16:15 - 16:35 Integrated Tactile Sensor Device
        Dr. Masanori Muroyama, WPI-AIMR

16:35 - 16:55 Local redox cycling-based electrochemical chip device for
       high-throughput cell analysis
        Dr. Kosuke Ino, Graduate School of Environmental Studies,
        Tohoku University

16:55 - 17:15 Microscale technologies to fabricate muscle tissues
        Dr. Samad Ahadian, WPI-AIMR

17:15 Closing Address
     Prof. Masayoshi Esashi


18:00 - 20:00 Reception

Admission: Free (Reception: 5,000 Yen)
Registration: February 8th 2013 (for Reception)

For registration and detailed program of Workshop, please refer to the PDF file below: