15th International Micromachine Nanotech Symposium - MEMS World

Date & Time: July 29th, 10:30-16:45
Venue: Tokyo Big Sight, Seminar Room A
Organizer: Micromachine Center
Supporters: Ministry of Economy, Trade & Industry, NEDO

Director Fraunhofer ENAS (Research Institution for Electronic Nano Systems), Prof.Dr. GESSNER and Dr.SANDNER from Fraunhofer IPMS (Institute of Photonic Microsystems) will participate in the 15th International Micromachine Nanotech Symposium - MEMS World - on July 29th.


Opening Remarks
Mr. Tamotsu NOMAKUCHI, Micromachine Center

Guest Speech
Mr. Takeshi YONEMURA, Manufacturing Industries Bureau, METI

- KEYNOTE SESSION - Concentration of R&D into Major International Institutes

MEMS in France: the R&D model and vision at LETI/MINATEC
Mr. Andre ROUZAUD, Silicon Heterogenous Integration Dept., CEA-LETI. MINATEC

Towards micro and nano technologies for integrated systems
Prof. Thomas GESSNER, Head of Fraunhofer ENAS

Worldwide Growth Opportunities for MEMS: MIG's Perspective on MEMS Activities in the US and Emerging Technologies
Ms. Karen LIGHTMAN, Managing Director, MEMS Industy Group

12:10-13:10 LUNCH

SESSION 1 - New World Explored by MEMS

Animal Watch Sensor System for Human Health and Food Safety
Dr. Toshihiro ITO, Group Leader, Networked MEMS Technology Group, AIST

Silicon Light Modulators: An Enabling Technology
Dr. Thilo SANDNER, Fraunhofer IPMS

Wearable Sensor Technologies for Realizing Safe, Secure and Healthy Societies
Prof. Kiyoshi ITAO, Tokyo University of Science

Harsh Environment Wireless MEMS Sensors for Energy & Power
Prof. Albert P. PISANO, Department of Mechanical Engineering, UC Berkeley, BSAC

15:10-15:20 BREAK

SESSION 2 - Latest Fabrication Process and Material Corresponding to Development Frontline

Can SOI break the MEMS law? A material supplier's view
Dr. Markku TILLI, Senior Vice President Research, Okmetic Oyj

Chip to Wafer bonding: The latest technology and future prospective
Mr. Sunil WICKRAMANAYAKA, Director of Technology Div., EVGroup

Hermetic packaging designs of MEMS: past and future prospective
Mr. Marco MORAJA, Business Manager, Getter for MEMS, SAES Getters S.p.A.

Closing Remarks
Mr. Kiichi AOYAGI, Micromachine Center