The Ultraclean Technology and Micromanufacturing department deals with production-technology issues connected with miniaturized and contamination- critical production processes. The area of work extends from the conceptual design of production equipment through to industrial implementation, production and support. The R&D services are focused on cleanliness and cleaning technology, contamination measurement systems, microassembly, plant development, production IT, logistics, production planning and optimization.


Production processes

• Selective cleaning:
  CO2, laser and plasma cleaning
• Contamination control on surfaces as well as in liquids and gases
• Transport and supply:
  handling of miniaturized and contamination-critical components
• Microassembly:
  gripping and joining of miniaturized and contamination-critical components
• Dispensing:
  microdosing of high-viscosity and conductive media

Production equipment

• Plant and equipment layout:
  material flow simulation, cleanness-compliant design and cleanroom materials
• System components and tools:
  intelligent tools, supply systems
• Equipment automation:
  sensor integration and equipment control
• Testing equipment:
  systems for surface testing and contamination control
• Qualification:
  cleanliness certification of equipment and material pairings

Series production for contamination-critical applications

• Analysis:
  process chains and production procedures
• Layout planning and IT concepts:
  cleanroom planning, material flow simulation, APC framework, MES evaluation, fab scheduling
• Equipment procurement and production start-up (ramp-up):
  Specification, testing and integration of equipment
• Optimization of production:
  cleanliness technology, material flow, production control (MES)

Special R&D services

• Studies:
  trend and market potential, competition, feasibility and cost analyses
• R&D consultancy:
  selection of suppliers and production service providers, miniaturization potential, funding sources
• Training:
  cleanroom personnel training, user seminars (VDA Band 19, Match-X)

Projects, Products and R&D Service

EUPASS – Evolvable Ultra-Precision Assembly SystemS
(EU Project – IP)

• Plant concept; process and equipment solutions for the assembly of microengineered components / products; novel control architecture

MASMICRO – Integration of Manufacturing Systems for Mass Manufacture of Miniature/Microproducts (EU Project – IP)

• Integrated solution for the European microsystem production and other industries
• Manufacturing Execution System (MES) for seamless production integration
• Automation / Integration of systems for the mass manufacture of microproducts

PartScan – Contamination control

• High-resolution, automatic and rapid detection of particulate contamination on individual substrates / strip materials; surface cleanliness
• Testing of automobile components

Material Inspec – Cleanroom suitable materials

• Standardized testing procedure for determining the particulate emission behavior of material pairings
• Contamination-free testing of materials for use in a cleanroom environment