nanomicro biz

Date: July 3rd - 5th, 2013 (10:00 - 17:00)
Venue: Tokyo Big Sight, East Hall 2

Fraunhofer Institute for Electronic Nano Systems (ENAS) and Fraunhofer Institute for Photonic Microsystems (IPMS) will have booths at nanomicro biz.

Fraunhofer ENAS
Booth: D-31

- 3D integration
- Low-temperature wafer bonding processes
- High-precision MEMS
- Mircro scanning mirrors using metallic glasses (Japan)

Fraunhofer IPMS
Booth: D-32

- Development / production of MEMS scanning mirrors
  in particular linear Scanner ("LinScan")
- Development / production of MEMS-mirror matrices (Spatial Light Modulator)
  in particular one-dimensional spatial light modulator ("Laser Direct Imaging ")
- MEMS Foundry Services

Japanese-German Micro / Nano Business Forum will be held within nanomicro biz.

For detailed program and online visitor registration of nanomicro biz, please refer to the official homepage below:
nanomicro biz