Events

Fraunhofer IPMS highlights - booth E-17

Fraunhofer IPMS, Dresden develops and fabricates modern MEMS and OLED devices in its own clean room facilities and carries out customer specific developments in fields of microelectronic and micro systems technology serving as a business partner that supports the transition of innovative ideas into new products. With modern equipment and about 200 scientists and engineers, the range of projects and expertise covers sensor and actuator systems, microscanner, spatial light modulators, lifetronics as well as organic materials and systems.

At the Micromachine/MEMS 2009 in Tokyo Fraunhofer IPMS presents:

1. SPECIAL HIGHLIGHT:
Lamda – Large aperture MEMS scanner module for 3D distance measurement

Fraunhofer IPMS presents at Micromachining/MEMS (Tokyo) for the first time the prototype of a new large aperture 1D MEMS scanner module especially designed for laser radar systems. The Lamda module is constructed based on a novel MEMS array of identical scanning mirror elements realized using flexible MEMS technology. The 1D MEMS scanner module comprises two separate scanning channels.
The new concept of using an array of synchronized identical MEMS mirror elements for LIDAR (Light Detection and Ranging) systems permits large reception apertures while preserving the outstanding reliability, high scanning speed, compact size and small system weight that can be expected from MEMS.

2. MEMS Spatial Light Modulator Demonstrator

MEMS Spatial Light Modulators (SLMs) are used to modulate the entire cross section of an incident beam of light simultaneously with high spatial resolution. Contrary to the digitally addressed SLMs in projectors that use time multiplexing to generate grey levels, the SLMs developed by Fraunhofer IPMS are addressed with analogue voltages that enable the chip to directly generate analogue intensities.

3. Microscan – a 1D scanner module

Fraunhofer IPMS presents a 1D micro scanner module. Its modular platform approach was developed to bridge the gap between the supply of bare micro scanner dies and the final integration in the customer application. A selected module is exhibited at Micromachine/MEMS 2009.

4. MEMS Adaptive Optics

Adaptive Optics (AO) is mainly used for the compensation of spatially and timely varying wavefront disturbances within an optical system for an enhancement in optical imaging through inhomogeneous or turbulent media.